Parallelization of thermochemical nanolithography

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چکیده

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Parallelization of thermochemical nanolithography.

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

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ژورنال

عنوان ژورنال: Nanoscale

سال: 2014

ISSN: 2040-3364,2040-3372

DOI: 10.1039/c3nr05696a